Fein Optic M48 Semiconductor Wafer Inspection Microscope Reflected Light

The Fein Optic M48 semiconductor wafer inspection microscope provides brightfield, darkfield reflected light microscopy. It features a sturdy all metal frame and long travel mechanical stage that accommodates 8" semiconductor wafers, slices, and substrates.

• Objective Lenses: Infinity Corrected Optical System objective lenses have the following specifications:
  • Infinity Corrected LWD BD Plan Achromat 5x, NA = 0.15, WD = 9.0mm
  • Infinity Corrected LWD BD Plan Achromat 10x, NA = 0.30, WD = 9.0mm
  • Infinity Corrected LWD BD Plan Achromat 20x, NA = 0.45, WD = 3.4mm
  • Infinity Corrected LWD BD Plan Achromat 50x, NA = 0.55, WD = 7.5mm
    
• Viewing Head: Trinocular viewing head with eyetubes angle adjustable between 5º and 35° with erect image. Has a beam splitter with light split either 100:0 or 0:100. The interpupillary distance is adjustable between 50mm - 76mm.
• Eyepieces: WF10x/22 high eyepoint plan eyepieces, diopter adjustable. Accepts a 26mm reticle.
• Frame: Reflected light frame with coaxial coarse and fine focus adjustment. Coarse distance 33mm, fine precision 0.001mm, with tension adjustment and upper limit stop.
• Nosepiece: BD quintuple nosepiece with DIC slot.
• Total Magnification: 50x, 100x, 200, 500x
• Specimen Stage: 8 inch 3-layer mechanical stage with X/Y axis coaxial adjustment with a moving range of 210mm x 210mm. Includes 8" wafer holder.
  
• Illumination: 10W LED BD reflected illuminator with electronic variable aperture and field diaphragm, center adjustable with switch for changing from brightfield to darkfield. Slots for filters and polarizing kit.
• Polarization: Includes polarizer for reflected light and 360º rotatable analyzer.
• Focusing: Ergonomically low positioned coaxial focusing controls allow the operator to work with their forearms relaxed on the working surface. Range of travel is 33mm. Rotation of fine focus is 0.001mm per revolution. Upper limit and tension adjustment.
• Size: 581mm (22.9") D x 541mm (21.3") H x 525mm (20.7") W

View the M48 brochure.