Motorized Stage

The Prior Scientific H116 motorized stage for upright microscopes offers the highest quality precision motorized stepper stage and can be adapted to virtually any upright microscope or optical system. This motorized stage is well suited for large samples. The motorized stage is perfect for scanning a wide range of semiconductor wafers, photo masks, 8" wafers, and printed circuit boards. The Intelligent Scanning Technology (IST) allows each stage to be pre-programmed with a unique set of operating characteristics particular to that stage to ensure optimum performance and allows the ProScan III controller to make any required adjustments to maintain superior orthogonally and metric accuracy.

Specify microscope make and model when ordering.

Motorized Stage Specifications:

• Travel: 255mm x 216mm XY travel (10" x 8.5")
  
• Motor Type: Stepper (Optional 0.1µm Linear Encoded - select when ordering)
  
• Resolution: 40nm (2mm screw pitch)
• XY Repeatability: +/-0.7µm
• Minimum Step Size: 0.04µm (No Encoder), 0.01µm (Encoded)
  
• Metric Accuracy (per mm of travel): 0.2µm (Requires use of ProScan III Controller)
  
• Maximum Velocity: 40mm/second
  
• Weight: 7.7 kg (17 lbs)
  
• Max Load Capacity:  25 kg (55 lbs)
• Warranty: 5 Years

View the H116 Motorized Stage Brochure

NOTE: This item is not returnable.

Prior Scientific Part #s H116/2, HE16/2.