M68 Advanced Semiconductor Motorized Stage Microscope

The Fein Optic M68 advanced semiconductor microscope is tailored for demanding inspection, metrology, and analysis of Semiconductor and MEMS devices in the wafer fabrication process. Providing observation in brightfield, darkfield, polarization, and DIC methods, outstanding optical performance and crisp images, which generate reliable and reproducible results. This M68 system includes a motorized stage.

• Objective Lenses: Includes the following Infinity Corrected Brightfield/Darkfield Plan Semi Apochromat lenses:
  • BD Semi Apo 5x, NA = 0.15, WD = 13.5mm
  • BD Semi Apo 10x, NA = 0.30, WD = 9.0mm
  • BD Semi Apo 20x, NA = 0.50, WD = 2.5mm
  • BD Semi Apo 50x, NA = 0.80, WD = 1.0mm
• Viewing Head: Ergonomic tilting trinocular upright and erect viewing head is adjustable from 5-35º. Beam splitting ratio: 100:0 or 0:100. Interpupillary distance adjustable from 50mm-76mm.
• Eyepieces: High eyepoint WF PL10x/23mm, with reticle retaining ring for a 26mm reticle.
• Frame: Has sturdy metal frame for brightfield/ darkfield reflected light. Shock proof frame features front located control buttons to operate the motorized nosepiece, illumination adjustments, and aperture diaphragm adjustments.
• Focusing: Low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. Upper limit and tension adjustment. Built-in 100-240V wide voltage system.
• Nosepiece: Motorized brightfield /darkfield sextuple nosepiece with DIC slot.
• Total Magnification: 50x, 100x, 200, 500x
• Specimen Stage & Stage components:
  • Motorized stage has an X/Y travel range of 255mm x 216mm. Read the stage specifications here.
  • Includes rotating wafer chuck that accommodates 200mm wafers.
  • Includes focus drive for precise and repeatable Z-axis focusing.
  • Includes XY joystick control unit for controlling motorized stage.
  • Motorized stage controller allows stage to travel up to 300mm/s.
  • Motorized stage controller can control steps from 0.01µm in the X/Y direction and those in the Z direction from 0.002µm.
• Illumination: 10W LED Brightfield/Darkfield reflected illuminator, electronic variable aperture and field diaphragm, center adjustable; Brightfield/Darkfield selector; slots for filters and polarizing kit.
• Polarization: Includes polarizer for reflected light and 360º rotatable analyzer.
• Size: 683mm (26.89") D x 519mm (20.43") H x 539mm (21.22") W

View the M68 Microscope Brochure