Fein Optic M68 Critical Dimension Semiconductor Microscope

This Fein Optic M68 critical dimension semiconductor microscope system has been designed for measurement of critical dimensions of semiconductors. The microscope system includes a PAXcam X5 camera equipped with PAX-it! Basic Measurement, PAX-it! Image Analysis, and PAX-it! Critical Dimensions software modules. Providing observation in brightfield, darkfield, polarization, and DIC methods, outstanding optical performance and crisp images, which generate reliable and reproducible results. The M68 supports up to a 200mm diameter wafer and 11 inches / 279.4mm of FPD (Flat Panel Display).

• Objective Lenses: Infinity Corrected Optical System objective lenses options:
• Infinity Corrected LWD Plan Achromat Brightfield/Darkfield, DIC
  • 5x, NA 0.15; WD 9.0mm
  • 10x, NA 0.3; WD 9.0mm
  • 20x, NA 0.45; WD 3.4mm
  • 50x, NA 0.55; WD 7.5mm
  • 100x, NA 0.80; WD 2.1mm
• Infinity Corrected Brightfield/Darkfield Plan Semi Apochromat
  • 5x, NA 0.15; WD 13.5mm
  • 10x, NA 0.30; WD 9.0mm
  • 20x, NA 0.50; WD 2.5mm
  • 50x, NA 0.80; WD 1.0mm
  • 100x, NA 0.90; WD 1.0mm
• Infinity Corrected LWD Brightfield/Darkfield Plan Semi Apochromat
  • 20x, NA 0.40; WD 8.5mm
  • 50x, NA 0.55; WD 7.5mm
  • 50x, NA 0.55; WD 10.6mm
  • 100x, NA 0.80; WD 2.1mm
  • 100x, NA 0.80; WD 3.5mm

• Viewing Head: Ergonomic tilting trinocular upright and erect viewing head is adjustable from 5-35º. Beam splitting ratio: 100:0 or 0:100. Optional 3-position beamsplitter with 100% - 80% / 20% - 100%  Interpupillary distance adjustable from 50mm-76mm.
• Eyepieces: High eyepoint WF PL10x/23mm, with reticle retaining ring for a 26mm reticle.
• Frame: Sturdy metal frame with model options for Reflected light or Reflected/Transmitted light. Shock proof frame features front located control buttons to operate the motorized nosepiece, illumination adjustments, and aperture diaphragm adjustments.
• Focusing: Low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. Upper limit and tension adjustment. Built-in 100-240V wide voltage system.
• Nosepiece: Motorized brightfield /darkfield sextuple nosepiece with DIC slot.
• Total Magnification: 50x, 100x, 200, 500x, 1000x.
• Specimen Stage Options:
• Manual 158mm x 158mm
• Manual 210mm x 210mm
• Motorized 154mm x 154mm
• Motorized 255mm x 215mm
• 6" and 8" wafer holder
• Illumination: 10W LED Brightfield/Darkfield reflected illuminator, electronic variable aperture and field diaphragm, center adjustable; Brightfield/Darkfield selector; slots for filters and polarizing kit.
• Filters & Attachments: Polarizing kit, Interference filters, DIC prism, IF550 Yellow Interference Filter for Photoresist inspection.
• Stage Micrometer: NIST certified stage micrometer with 2 separate scales - 1mm divided into 100 divisions and 10mm divided into 100 divisions.
• Camera & Software: System includes the PAXcam X5, 5 megapixle color camera with recommended c-mount adapter and PAX-it! Basic Measurement, PAX-it! Image Analysis, and PAX-it! Critical Dimensions modules. Imaging computer with i5 processor, 32GB / 512GB and 2 hours of online training sessions.
• Size: 683mm (26.89") D x 519mm (20.43") H x 539mm (21.22") W

View the M68 Microscope Brochure