Microscope Automation: Nanopositioning Piezo Stages

The NPS-XY-100A Nanopositioning stage is a piezo scanned flexure-guided stage with integrated capacitance sensors capable of sub-nanometer resolution and reproducibility. The stage is made of aluminum. The unique isostatic mounting system ensures that...

The WP120A low profile, high-load Z stage for 12" (300mm) wafers provides millisecond response times and the high bandwidth make this wafer positioning system ideal for applications where high throughput is essential. The stage is designed to hold 12"...

The WP120A low profile, high-load Z stage for 12" (300mm) wafers provides millisecond response times and the high bandwidth make this wafer positioning system ideal for applications where high throughput is essential. The stage is designed to hold 12"...

The NPS-XY-100A Nanopositioning stage is a piezo scanned flexure-guided stage with integrated capacitance sensors capable of sub-nanometer resolution and reproducibility. The stage is made of Super Invar, a material that minimizes thermal expansion. The...

The NPS-XY-100A Nanopositioning stage is a piezo scanned flexure-guided stage with integrated capacitance sensors capable of sub-nanometer resolution and reproducibility. The stage is made of Super Invar, a material that minimizes thermal expansion. The...

The NPS-XY-100D Nanopositioning stage is a piezo scanned flexure-guided stage with integrated capacitance position sensors capable of sub-nanometer resolution and reproducibility. The stage is made of aluminum. The unique isostatic mounting system...

This nanopositioning ultra high vacuum stage delivers over 100µm of range at 80K and 10-9 Torr. The stage is designed to operate in closed-loop mode using capacitive positioning sensors. The fast update rate and control algorithms allow for high...

This single axis Nanopositioning stage has one linear axis of motion and is intended primarily for horizontal motion. However, the stage will function in other orientations. The capacitive sensor design provides sub-nanometer displacement measurement...

This single axis Nanopositioning stage has one linear axis of motion and is intended primarily for horizontal motion. However, the stage will function in other orientations. The capacitive sensor design provides sub-nanometer displacement measurement and...